This is the first demonstration of a silicon device
containing a moving part
made by proton beam writing (PBW)
and subsequent selective porous Si (PS) etching.




This microturbine was made by proton beam writing (PBW)
and subsequent selective porous Si (PS) etching
in collaboration between the
Institute of Nuclear Research of the Hungarian Academy of Sciences (ATOMKI)
and the Research Institute for Technical Physics and Materials Science (MFA)
of the HAS.
Contact: István Rajta (rajta at atomki.hu)